埃德万斯：智能制造风口筹谋中国“弯道超车”

2016年10月27日 10:26:49 来源： 中华工商时报

    离子束应用系统跻身高端制造改变长期缺“芯”被动格局

　埃德万斯，英文的意思为先进的。

　　今年以来，在苏州的第二届中国半导体行业协会MEMS分会市场年会、上海的全球智能制造大会、北京的第二届中国制造2025与工业4.0全球年会等专业峰会上，北京埃德万斯离子束技术研究所股份有限公司步入了公众的视野，它独有的尖端设备和高端制造解决方案，让业界为之一振：中国原来有如此的利器，并能驱动非硅产业进而助推制造业的转型升级。

　　身为埃德万斯的统帅，刁克明志存高远。面对业界投来的期许目光，他和他的团队有一种愈加强烈的使命感。当下阶段，高端装备之争已上升为大国之间博弈的核心和不可或缺的重器。“下一步，于智能制造风口上筹谋中国在非硅微纳米制造‘弯道超车’。”埃德万斯将主攻方向锁定。

　　跻身高端制造打出中国“芯”

　　上个月，备受关注的上海全球智能制造大会如期开幕。工信部电子信息司司长刁石京专程来到埃德万斯站台并询问柔性基底上微纳米镀膜这一工业制造的新兴课题，刁克明详细介绍了这一解决之道。

　　柔性基底上微纳米镀膜是现实未来可穿戴系统的前提，新型功能材料薄膜制造更代表着当今世界高端制造的发展趋势之一，而这一设备制造和工艺技术长期被德美等制造强国所把持，现在这一垄断被埃德万斯彻底打破，并后来居上获得这一领域的“话语权”。

　　始创于新世纪元年的埃德万斯，前身为原航天部系统的一个科研机构，上世纪80年代自主研发了国内首台商用成套离子束刻蚀机、离子束溅射镀膜机，被当时国家机械委定位“取代进口和供出口产品”。此后始终瞄准世界前沿科研的发展方向，并在这一基础上创造了离子束应用工艺技术体系。

　　目前，由离子束综合应用系统“打磨”的微纳米器件，更多被用于上天入海、高热高寒、复杂电磁环境、强腐蚀性条件等特殊领域。因而，这一利器在业界有后工业时代开启智能制造的潘多拉之盒的美誉。

　　多年来，由于一些特殊需要和要求，埃德万斯一直“低调”前行，默默地服务于国内航空、航天、兵器等军工领域并提供技术解决方案，后延伸到国内顶尖级的科研院校。伴随“中国工业2025”战略的发布，这家企业才浮出水面，从军工走向民用。

　　传感器被视为物联网的“心脏”。据一项研究报告披露，“缺芯”的中国，不但传感器生产基础薄弱，而且高端传感器芯片更要依赖全部进口，仅去年芯片产业进口花费就高达2307亿美元，为原油进口总额的1.7倍，已连续多年成为第一大进口商品。

　　MEMS（微机电系统）是微纳米制造领域新方向，同时MEMS又是传感器发展的新导向，因为它能满足超薄超微、集中度高等要求。“制造高端”，天降大任于埃德万斯。手握这一利器，这家企业当下肩负起国内MEMS传感器芯片打造重任，并紧跟国际前沿在已开始大规模应用的非硅MEMS传感器芯片制造上扮演先行者的角色。

　　值得关注的是，以美国为首的西方国家，目前研发制造平台单家拥有的离子束应用设备均不超过50台，而埃德万斯已具备百台数量规模。“由离子束综合应用体系为核心而形成的综合解决方案的开放平台，这更有助于改变中国制造长期缺“芯”的被动局面。”上海交大微纳米学院原副院长赵大林这样评价。

　　架构跨界科创驱动平台

　　今年“两会”上，工信部部长苗圩首次对外发布中国从制造业大国向制造业强国转变的时间表，大体需要用3个10年来完成并提出了分三步走的战略。

　　“中国制造2025”是三步走战略第一个十年的行动纲领，与德国“工业4.0”确立的目标大体相一致，主攻方向都是智能制造。“‘德国制造’最核心的价值是完善的创新驱动体系及顶层设计，这是中国更应该去对标的。”国家863计划MEMS重大专项总体组组长孙立宁发出告诫。

　　从京城驱车往北，沿海淀区地锦路便可抵达中关村环保科技园，埃德万斯正在构建的非硅产业工艺技术研发集群就坐落于其中。大概是看中这家高科技企业的独有优势和潜在价值，中关村管委会给予了不少优惠政策。

　　“我们更看中这里无可比拟的科创孵化器的生态环境。”刁克明坦言。入住中关村前，埃德万斯已悄然确立了一个架构跨界创新驱动平台的战略，这是在充分吸收和借鉴德国“工业4.0”的联合模式基础上设计的。

　　据了解，这一战略概括为“1+1+1”，即：一个发展高附加值制造业的科技创新联盟；一个非硅MEMS创新的实验基地；一个打造后工业时代工匠的示范工厂。

　　早在上世纪80年代，埃德万斯开始向中科院、航天科工、中电科、清华大学、上海交大等国内一大批科研院所和高等学校输出利器，并辐射到物理、化学、光学、电子、生物、磁学、超导、红外等基础科学领域最前沿的研究，实质上这是一个“隐形”的科创平台。

　　“在整合基础上，将这一知本平台平移并对接到产业之中，锻造一个产、学、研、用并联的技术研发集群，补上先导型高技术开发落后的短板，更好地适应未来智能制造引发的生产模式和产业形态的重大变革。”刁克明自信地说。

　　非硅MEMS助力中国“弯道超车”

　　每一次工业革命的到来，都伴随新材料的先期出现。上世纪中叶硅材料的大规模应用，在工业上带来一次革命，由此步入了微纳米时代。此后随大规模集成电路飞速更新迭代，时下硅材料正逐渐接近5纳米的理论极限，人们称之为“摩尔定律的黄昏”。

　　值得关注的是，在构建微纳米制造为产业变革平台后，西方制造强国举全力加快MEMS发展。“在那个倡导引进、消化、吸收的特殊时代，中国跟在大规模集成电路的旧途上追赶，并至少落后30年。”英特尔（中国）战略合作部原总经理庞军分析指出。

　　国际权威机构Yole研究表明，步入2000年，西方制造强国在硅材料研究与应用上逐渐开始下降。在近10年中，德国的博世、美国的德州仪器、意大利的意法半导体在传感器上已侧重非硅开发与应用，而这三家巨头占整个世界MEMS传感器市场半数天下。

　　机会总是留给又准备的人。时间退到上世纪70年代末，现任埃德万斯首席科学家的刘金声，被“中国航天之父”钱学深钦点为航天离子束推进器的研发小组做负责人，一举奠定了中国离子源理论发展体系，更移植到离子束创新应用上。

　　仿佛有老天在眷顾埃德万斯，这一离子束综合应用体系在当今非硅材料加工大趋向上占具了独到优势，从而使这家企业所当然挂上了开启中国非硅大时代的钥匙，被业界称为中国非硅产业的“仙童半导体”。

　　站在时代前沿，埃德万斯有了与众不同的视野。在刁克明看来，当下中国制造业最尖端产业与最落后产业并存的现状，这并不表示只能永远跟在“德国制造”后面。既然已站在智能制造大趋势风口上，只要“路径选对”，后发先至更有可能。

　　早在今年5月，埃德万斯牵头起草了国内首个《关于中国构架非硅MEMS发展战略的报告》，并在报告中建议“布局智能制造，要关注微纳米制造领域中MEMS整体发展，对非硅MEMS作适度加法，对MEMS作适度减法。”

　　更值得关注的是， 资本市场已经悄然锁定埃德万斯。今年以来，国内一些知名投资公司密集对接这家企业。在这些投资人眼中，谁占有趋势，谁就将拥有未来。（记者周勇刚）

ADVANCED:Intelligent Manufacturing Plan Chinese Outlet

This year, the second in Suzhou Chinese Semiconductor Industry Association MEMS branch market annual meeting, Shanghai's global Intelligent Manufacturing Conference, Beijing second session of the 2025 and 4 China manufacturing industry annual global professional summit, Beijing Limited by Share Ltd advanced ion beam technology research institute has entered the public view, sophisticated equipment and high-end it unique manufacturing solutions, let the industry lifted: there is so Chinese tool, and can drive the transformation and upgrading of non silicon industry and thus boost the manufacturing industry.

As the ADVANCED commander, Diao Keming lofty. In the face of expectations from the industry, he and his team have an increasingly strong sense of mission. At this stage, high-end equipment dispute has risen as the core country between the game and indispensable jack. "The next step in intelligent manufacturing plan Chinese outlet in non silicon micro nano manufacturing" overtaking "." The main target will be locked.

Among the high-end manufacturing, playing China's core"

Last month, the Shanghai global Intelligent Manufacturing Conference, which attracted much attention, opened as scheduled. Ministry of industry and electronic information division director Diaoshi Beijing made a special trip to the station and asked the advanced flexible substrate micro nano coating of emerging topics in this manufacturing industry, Diao Keming introduced a solution.

Flexible substrate micro nano coating is a realistic future wearable system of the premise, the new functional material film manufacturing more represents one of the development trend of the world's high-end manufacturing, the manufacturing equipment and technology has long been dominated by German manufacturing power, now the monopoly was broken and advanced, catch up from behind "the right to speak get this field".

Founded in the first year of the new century advanced, formerly known as a scientific institution the original Department of space systems, in 80s developed the first domestic commercial complete sets of ion beam etching, ion beam sputtering machine, by the then national machinery committee positioning "and for export products to replace imports". Since then, we have always aimed at the development direction of the world's cutting-edge scientific research, and in this foundation created the ion beam application technology system.

At present, micro nano devices which are polished by ion beam integrated application system are more used in such special fields as heaven into the sea, high temperature, high cold, complex electromagnetic environment and strong corrosive conditions. Therefore, this tool has the reputation of "Pandora's box" of Intelligent Manufacturing in the post industrial era.

Over the years, because of some special needs and requirements, has been advanced "low-key" forward, quietly serving the domestic aviation and aerospace, weapons and other military areas and provide technical solutions, after extending into the domestic top level scientific research institutions. Accompanied by the "China industry 2025" strategy released, the enterprise surfaced, from military to civilian.

Sensors are regarded as the heart of the Internet of things". According to a research report revealed that the lack of core "Chinese, not only based sensor production is weak, and the high-end sensor chip depends on all imports, only last year, the chip industry import costs up to $230 billion 700 million, 1.7 times of crude oil imports, has become the first major imported goods.

MEMS (micro electro mechanical system) is a new direction in the field of micro nano manufacturing. At the same time, MEMS is the new direction of sensor development, because it can meet the requirements of ultra thin, ultra micro, high concentration. "High-end manufacturing", it has fallen to advanced. With this tool, the current domestic enterprises shoulder MEMS sensor chip to create a task, and keep up with the international frontier has begun to play the role of pioneer in the large-scale application of non silicon MEMS sensor chip manufacturing.

It is noteworthy that the western countries headed by the United States, the current R & D and manufacturing platform with single ion beam applications are not more than 50 units, and has advanced 100 Taiwan number scale. "An open platform for integrated solutions based on the integrated application system of ion beams, which helps to change the passive situation in which China has long been lacking in" core "." Shanghai Jiaotong University Institute of micro nano Zhao Dalin, former vice president of such evaluation.

Cross platform architecture driven by

This year's "two sessions", the Ministry of industry minister Miao Wei first announced the timetable for China's shift from a manufacturing power to a manufacturing power, generally need to use 3 10 years to complete, and proposed a "three steps" strategy.

"Made in China 2025" is the three step strategy, the first ten years of action program, and the German "industrial 4" established goals roughly consistent, the main direction is intelligent manufacturing. The core value of "made in Germany" is a sound innovation drive system and top-level design, which is China should be more benchmarking." National 863 plan MEMS major special team leader Sun Lining issued a warning.

From the capital driving north, along the Haidian District road test can be reached in Zhongguancun environmental science and Technology Park, non silicon industry technology research and development advanced cluster are building is located in the. Perhaps the unique advantages and potential value of this high-tech enterprise, Zhongguancun CMC has given a lot of preferential policies.

"We see here by the ecological environment There is nothing comparable to this incubator." Diao Keming admits. In Zhongguancun, has quietly established advanced drive platform a framework of cross-border innovation strategy, which is to fully absorb and learn from the design of the German industrial 4 joint model based on.

It is understood that this strategy is summarized as "1+1+1", that is: a development of high value-added manufacturing alliance of scientific and technological innovation; a non silicon MEMS Chong